XT H 320 for X-ray and CT inspection of larger samples

The XT H 320 features a more powerful microfocus X-ray source that is able to run highly accurate inspection on dense industrial objects. Nikon Metrology is the only company to produce 320 kV microfocus X-ray sources. As the X-ray spot size of these sources is orders of magnitude smaller compared to minifocus sources, end users benefit from superior resolution, accuracy and a wider array of measurable parts.

With the optional rotation reflection target, an even higher X-ray flux is available enabling customers to obtain faster CT data acquisition or achieve higher CT data accuracy in the same time span


  • Proprietary 320 kV microfocus X-ray source
  • Run highly accurate inspection on dense industrial objects
  • Easy system operation and low cost-of-ownership
  • Stunning images providing great insight
  • High performance image acquisition and volume processing
  • Straightforward inspection automation
  • Safety first


  • Fault detection and failure analysis
  • Assembly inspection of complex mechanisms
  • Dimensional measurement of internal components
  • Part-to-CAD comparison
  • Advanced material research
  • Analysis of the biological structures
  • Digital archiving of models

Benefits & features

  • Superior accuracy and performance through proprietary 225 or 320kV micro-focus X-ray source
    The default 225 kV microfocus source is equipped with a reflection target, offering a 3 micron spot size. With the optional transmission target, you obtain an even smaller spot size and higher magnification capability. The 320 kV microfocus source is used to penetrate through larger or denser samples. Regardless of the target of choice, the XT H LC system uses an open-tube X-ray source that guarantees a lower cost-of-ownership
  • Rotating reflection target multiplies X-ray flux
    Traditional X-ray sources using fixed targets can only receive a limited flux of electrons to avoid damaging the target. By introducing a rotating reflection target that yields much better cooling performance, the electron flux on the rotating target radically increases without the risk for permanent damage. This boosts X-ray flux by a large factor, and enables customers to obtain faster CT data acquisition or achieve higher CT data accuracy in the same time span. By establishing up to 5 times more X-ray flux, customers can either speed up data acquisition by a similar factor or increase data accuracy by taking more radiographs in the same time.
  • Stunning images from internal structures
    A small spot size and a high-resolution flat panel create sharp images. Adapt resolution to your needs: full part in coarse resolution and high resolution in a desired region of interest.
  • Easy access to inspect larger parts
    The XT H LC systems feature a large access door and the heavy-duty precision 5-axis manipulator can hold samples in excess of 50 kg with dimensions of 0.6 m (H) x 0.6 m (D).
  • Safety first
    Full protective enclosure – compliant to CE and DIN 54113 radiation safety standards – requires no special badges or protective clothing. Continuous fail-to-safe monitoring during system operation. Radiation shielding is to better than 1µSv/hour external, and dual fail-safe switches/relays ensure safe operation
  • Configure the system to your specific needs
    Specific applications require more detailed images or higher accuracy. XT H 320 can be configured with different flat panels (Varian, Perkin Elmer) or source configuration (reflection/ transmission target) to make the system ideally suited for your needs.


Microfocus source
Max. kV
Max. power
Focal spot size
Focal spot size  at max power
225 kV Reflection target ●
225 kV
225 W
3 µm up to 7 W
225 µm at 225 W
225 kV Rotating target option ○
225 kV
450 W
10 µm up to 30 W
160 µm at 450 W
320 kV Reflection target ●
320 kV
320 W
30 µm up to 30 W
320 µm at 320 W

# Bits
Active pixels
Pixel Size
Max. frame rate
at 1x1 binning

Max. frame rate
at 2x2 binning

Perkin Elmer 1611 ○
4000 x 4000
100 µm
3.75 fps
7.5 fps
Perkin Elmer 1620  ○
2000 x 2000
200 µm
3.75 fps
7.5 fps
Perkin Elmer 1621 EHS ○
2000 x 2000
200 µm
15 fps
30 fps

● Basic configuration

○ Alternative configuration


# Axes
4 (optional 5th axis)

Axes travel

(Typical values - Exact values depend on system configuration)
(X) 500 mm
(Y) 610 mm
(Z) 800 mm
(Rotate) n*360°
Max. sample weight
100 kg


Cabinet dimensions (LxWxH)
2695 mm x 1828 mm x 2249 mm
8,500 kg
All systems are manufactured to IRR99
Control software
All systems are controlled by Nikon Metrology’s in-house Inspect-X software

Products Technologies Industries served Services Consultation and training About Contact
T. 1 (450) 424-2000